The effect of including the ion flux issuing from the core of an electronegative plasma on the electron temperature versus pressure characteristic

The effect of including the ion flux issuing from the core of an electronegative plasma on the electron temperature versus pressure characteristic
复制标题

包括从电负性等离子体核心发出的离子通量对电子温度与压力特性的影响

DOI:
--
复制
发表时间:
2002
期刊:
影响因子:
--
通讯作者:
R. Franklin
R. Franklin
中科院分区:
--
文献类型:
--
作者:
R. Franklin

文献摘要

被引文献

相似文献

建立了过渡等离子体的恒定碰撞频率模型,即介于无碰撞和完全碰撞之间的等离子体。然后用它来描述电负性等离子体的外部区域,从而得到整个等离子体的等离子体平衡方程。选择氯气作为样本气体,探讨了该模型与根据Thompson(Thomson J B 1959 Proc.)导出的双极扩散系数提出的模型之间的差异。太棒了。SoC。73 818)。这种差异似乎是可以通过实验测量的。文中还给出了用常离子平均自由程模型估算这一效应的相应数值。
The constant collision frequency model for a transitional plasma, i.e. one that is between collisionless and fully collisional, is developed for the situation where there is a flux of positive ions and electrons into the plasma. This is then used to describe the outer region of an electronegative plasma and thus obtain a plasma balance equation for the whole plasma. Chlorine is chosen as an exemplar gas for which the differences are explored between this model and another that has been suggested based on the ambipolar diffusion coefficient derived by Thompson (Thomson J B 1959 Proc. Phys. Soc. 73 818). The differences appear to be experimentally measurable. Corresponding values for estimating the effect using a constant ion mean free path model are also given.