Fabrication of soft gold microelectrode arrays as probes for scanning electrochemical microscopy
Fabrication of soft gold microelectrode arrays as probes for scanning electrochemical microscopy
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DOI：
10.1016/j.jelechem.2011.12.005
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发表时间：
2012-02-01
影响因子：
4.5
通讯作者：
Wittstock, Gunther
中科院分区：
文献类型：
--
作者：
Lesch, Andreas;Momotenko, Dmitry;Wittstock, Gunther
使用气溶胶喷射（R）印刷技术制造用于高通量扫描电化学显微镜（SECM）成像的软线性金微电极阵列。将纳米颗粒金油墨印刷在聚酰亚胺薄膜上。烧结后，沉积200 nm厚的聚对二甲苯C涂层以覆盖和密封金轨道。微电极阵列的横截面通过使用指向金属掩模上的ArF准分子激光束进行激光切割而暴露。循环伏安图、接近曲线和反馈模式下的SECM图像证明了阵列作为SECM探针的能力。玻璃上铂带结构的反应性成像是用聚对二甲苯C涂层面向基板进行的，提供了几乎恒定的工作距离。阵列的柔软性导致弯曲，并允许以接触模式扫描，如刷样品表面。对于诸如阵列电极结构和类似材料的硬表面，这在对样品没有可检测的损坏的情况下发生。(C)2011 Elsevier B.V.保留所有权利。
Soft linear gold microelectrode arrays for high throughput scanning electrochemical microscopy (SECM) imaging were fabricated using the Aerosol Jet (R) printing technology. Nanoparticulate gold ink was printed on polyimide Kapton HN (R) thin films. After sintering, a 200 nm thick Parylene C coating was deposited to cover and seal the gold tracks. A cross-section of the array of microelectrodes was exposed by laser cutting using an ArF excimer laser beam directed onto a metallic mask. Cyclic voltammograms, approach curves and SECM images in feedback mode demonstrate the capability of the arrays as SECM probes. Reactivity imaging of a platinum band structure on glass was performed with Parylene C coating facing the substrate providing an almost constant working distance. The softness of the array leads to a bending and allows scanning in contact mode like brushing the sample surface. For hard surfaces such as array electrode structures and similar materials, this occurs without detectable damage to the sample. (C) 2011 Elsevier B.V. All rights reserved.