Using Finite Element Simulation Calculate Output-voltage of MEMS Piezoresistive Pressure Sensor
Using Finite Element Simulation Calculate Output-voltage of MEMS Piezoresistive Pressure Sensor
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发表时间：
2010
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通讯作者：
Sun Xiao-long
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作者：
Sun Xiao-long
提出了一种利用仿真软件conventware对MEMS压阻式压力传感器进行有限元仿真的方法。可以直接计算出传感器在一定压力下的输出电压。该方法可使MEMS压力传感器的设计过程准确、简单、直观。它不同于传统的仅凭经验设计传感器膜的厚度或电阻器的位置。
A finite element simulation method to analyze MEMS piezoresistive pressure sensor by using simulation software coventor ware was presented.The output-voltage of the sensor under a certain pressure can be calculated directly.This method can make the design process of MEMS pressure sensor accurate,simple and intuitionistic.It is different from the traditional way which designs the thickness of sensor membrane or location of resistor by experience only.