Plasma Nitriding in a Low Pressure Triode Discharge to Provide Improvements in Adhesion and Load Support for Wear Resistant Coatings
Plasma Nitriding in a Low Pressure Triode Discharge to Provide Improvements in Adhesion and Load Support for Wear Resistant Coatings
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低压三极管放电中的等离子渗氮可改善耐磨涂层的附着力和负载支撑
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发表时间：
1991
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通讯作者：
A. Matthews
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作者：
A. Leyland;K. Fancey;A. Matthews
通过物理气相沉积 (PVD) 技术生产的耐磨涂层正在获得越来越广泛的工业认可，特别是在切削工具、铸造、成型和挤压模具以及各种其他材料加工应用中使用时，作为提高使用寿命和产品质量的一种手段。氮化钛涂层现在被广泛使用，第二代合金涂层例如Ti(C,N)、Ti(B,N)、(Ti,Al)N和(Ti,W)C正在考虑用于特定的磨损情况。扩展等离子体辅助 PVD 加工适用性的下一阶段可能是在第三代多组分涂层领域，该领域可能包含多层和/或双重扩散/涂层等离子体处理。这些新的组合处理主要旨在提高涂层的耐久性（特别是韧性和耐腐蚀性）。因此，使用比传统工具钢更便宜、更轻和/或更耐腐蚀的替代基材材料也将变得越来越重要。为了用这些“新”材料实现良好的涂层支撑，等离子体扩散或注入处理可能发挥主要作用，特别是在要保持足够的涂层-基材粘附力的情况下。本文研究了 ASP 23 工具钢的双低压三极管等离子体扩散/涂层处理，并证明如果采用适当的处理条件，等离子体渗氮有可能对 PVD 涂层支撑提供实质性改进。研究了低压三极管等离子体预涂扩散处理适用性背后的等离子体理论，特别是通过氩-氢等离子体预清洗去除表面氧化物以及通过调整氮化放电参数控制白层。还讨论了氮化/涂层 (TiN) 系统在划痕附着力测试下的性能。
Wear resistant coatings produced by physical vapour deposition (PVD) techniques are gaining increasingly widespread industrial acceptance, particularly as a means of providing improvements in service life and product quality when used on cutting tools, on casting, moulding, and extrusion dies, and in a variety of other materials processing applications. Titanium nitride coatings are now widely used and second generation alloy coatings such as, for example, Ti(C,N), Ti(B,N), (Ti,Al)N, and (Ti,W)C are being considered for specific wear situations. The next stage in extending the applicability of plasma assisted P VD processing is likely to be in the area of third generation multicomponent coatings, which may incorporate multilayers and/or duplex diffusion/coating plasma treatments. These new combined treatments will primarily be designed to improve coating durability (particularly with regard to toughness and corrosion resistance). The use of alternative substrate materials which are cheaper, lighter, and/or more corrosion resistant than traditional tool steels will therefore also become increasingly important. In order to achieve good coating support with these ‘new’ materials, plasma diffusion or implantation treatments are likely to play a major role, especially if adequate coating-substrate adhesion is to be maintained. This paper investigates the duplex low pressure triode plasma diffusion/coating treatment of ASP 23 tool steel and demonstrates that plasma nitriding has the potential to provide substantial improvements in PVD coating support, if appropriate treatment conditions are employed. The plasma theory behind the suitability of low pressure triode plasmas for precoating diffusion treatments is examined, with particular regard to surface oxide removal by argon-hydrogen plasma precleaning and white layer control by adjustment of the nitriding discharge parameters. The performance of the nitrided/coated (TiN) system under scratch adhesion testing is also discussed.