Reduction of Sheet Resistance and Improvement of Radiation Efficiency by Annealing Treatment of ITO Transparent Antenna

Reduction of Sheet Resistance and Improvement of Radiation Efficiency by Annealing Treatment of ITO Transparent Antenna
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DOI：
10.23919/icep55381.2022.9795379
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发表时间：
2022-05
期刊：
2022 International Conference on Electronics Packaging (ICEP)
影响因子：
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通讯作者：
Yuri Yamada;F. Koshiji;Y. Yasuda;T. Uchida;Katsumi Yamada
Yuri Yamada;F. Koshiji;Y. Yasuda;T. Uchida;Katsumi Yamada
中科院分区：
其他
文献类型：
--
作者：
Yuri Yamada;F. Koshiji;Y. Yasuda;T. Uchida;Katsumi Yamada

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在本研究中，研究了通过退火处理降低用作辐射元件的氧化铟锡（ITO）透明导电薄膜的方块电阻，以提高使用透明导电薄膜的单极天线的辐射效率。结果证实，通过增加膜厚度和退火，方块电阻显着降低，辐射效率提高至72.23%
In this study, the sheet resistance reduction of Indium Tin Oxide (ITO) transparent conductive films, which are utilized as the radiating elements, by annealing treatment was investigated to improve the radiation efficiency of monopole antennas using transparent conductive films. As a result, it was confirmed that the sheet resistance was significantly reduced and the radiation efficiency was improved to 72.23 % by increasing the film thickness and annealing