Simulation of single-point diamond turning fabrication process errors
Simulation of single-point diamond turning fabrication process errors
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DOI:
10.1117/12.511341
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发表时间:
2003-11
期刊:
影响因子:
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通讯作者:
Richard C. Juergens;R. Shepard;J. Schaefer
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文献类型:
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作者:
Richard C. Juergens;R. Shepard;J. Schaefer
Single point diamond turning of optical surfaces is becoming more commonly used, especially in infrared systems. However, the process introduces its own peculiar forms of figure error that can compromise performance. These errors include tool misalignment error, thermal effects, low frequency surface ripple, and mounting effects. Techniques have been developed to model these effects in Monte Carlo simulations using conventional optical design codes to predict the changes in optical performance.