Design and performance of an energy‐ and angle‐resolved secondary ion mass spectrometer
Design and performance of an energy‐ and angle‐resolved secondary ion mass spectrometer
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能量和角度分辨二次离子质谱仪的设计和性能
DOI：
10.1063/1.1136751
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发表时间：
1981
影响因子：
1.6
通讯作者：
N. Winograd
中科院分区：
文献类型：
--
作者：
R. Gibbs;N. Winograd
描述了能量和角度分辨二次离子质谱仪的设计和性能。该仪器采用安装在法兰上的四极滤质器，可在超高真空条件下旋转，从而允许改变二次离子的极性收集角，而样品晶体绕平行于一次离子束的轴旋转提供方位角截面。使用 90° 球形静电扇区与提供 1-15 eV 可变带通的加速/减速透镜系统相结合，在 0-100 eV 范围内进行能量分析。低能电子衍射提供有关表面和吸附物几何形状的补充信息。从离子轰击 Ni(001)c(2×2)-CO 表面喷射的二次离子的能量和角度分布的测定说明了该系统的能力。
The design and performance of an energy‐ and angle‐resolved secondary ion mass spectrometer are described. The instrument incorporates a quadrupole mass filter mounted on a flange which can be rotated under ultrahigh vacuum conditions, allowing variation of the polar collection angle of secondary ions, while rotation of the sample crystal about an axis parallel to the primary ion beam provides azimuthal angle section. Energy analyses are performed in the 0–100 eV range using a 90° spherical electrostatic sector combined with an accelerating/decelerating lens system which provides a variable 1–15 eV bandpass. Low energy electron diffraction provides complementary information on surface and adsorbate geometry. The determination of energy and angular distributions of secondary ions ejected from an ion‐bombarded Ni(001)c(2×2)–CO surface illustrates the capabilities of the system.