Microfabrication of structures by laser light in metal-doped glasses
Microfabrication of structures by laser light in metal-doped glasses
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DOI：
10.1016/s0925-3467(03)00154-x
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发表时间：
2003-10
影响因子：
3.9
通讯作者：
M. Rosenbluh;I. Antonov;D. Ianetz;Y. Kaganovskii;A. Lipovskii
中科院分区：
文献类型：
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作者：
M. Rosenbluh;I. Antonov;D. Ianetz;Y. Kaganovskii;A. Lipovskii
展示了在新型金属掺杂玻璃的表面和本体上的光结构的直接激光记录。我们记录了这些材料中的二维和三维光结构。光结构是激光的强度分布，其可以采取聚焦光束的形式以形成微透镜，移动聚焦光束以绘制亚微米宽度的线或干涉图案以写入周期性结构。实验在次表面层中含有Cu2+或Ag+离子的玻璃中进行，所述离子通过在热氢气氛中还原而还原成Cu或Ag原子。材料进行了研究，使用连续波和脉冲激光在宽范围的脉冲长度和峰值强度，并在各种波长的UV到IR。记录的结构，其特征在于使用光学显微镜，原子力显微镜和光衍射。从理论和实验两方面研究了玻璃对激光辐射敏感性的机理。我们已经能够证明和控制光如何被玻璃中的纳米颗粒吸收，纳米颗粒的温度如何作为簇大小，激光波长和脉冲持续时间的函数而变化，以及玻璃基质如何受到随机分布的簇中吸收的激光能量的影响。对于我们研究的玻璃，吸收的光导致纳米颗粒周围的玻璃局部熔化，然后导致材料中的传质和传热动力学。这又导致簇聚集和运动，并允许记录光中的强度图案。测量了团簇的生长、合并和运动。
The direct laser recording of light structures on the surface and in the bulk of novel, metal-doped, glasses is demonstrated. We record both two- and three-dimensional light structures in these materials. The light structure is an intensity distribution of the laser light, which can take the form of a focused beam to form microlenses, a moving focused beam to draw lines of sub-micron width or an interference pattern to write periodic structures. Experiments were performed in glasses containing either Cu2+or Ag+ions in a sub-surface layer, which are reduced to Cu or Ag atoms via reduction in a hot hydrogen atmosphere. The materials were investigated using both cw and pulsed laser light over a wide range of pulse lengths and peak intensities and at various wavelengths from the UV to the IR. The recorded structures were characterized using optical microscopy, atomic force microscopy and light diffraction. The mechanisms responsible for the sensitivity of the glass to laser radiation have been investigated both theoretically and experimentally. We have been able to demonstrate and control how the light is absorbed by the nanoparticles in the glass, how the temperature of the nanoparticles varies as a function of cluster size, laser wavelength and pulse duration, and how the glass matrix is effected by the laser energy absorbed in the randomly distributed clusters. For the glasses we have studied, the absorbed light results in local melting of the glass surrounding the nanoparticle which then leads to mass transfer and heat transfer kinetics in the material. This in turn leads to cluster aggregation and motion and allows the recording of the intensity pattern in the light. The growth of the clusters and their coalescence and motion has been measured.