Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation
Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation
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DOI：
10.1109/jmems.2006.879378
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发表时间：
2006-08-01
影响因子：
2.7
通讯作者：
Fujita, Hiroyuki
中科院分区：
文献类型：
--
作者：
Fukuta, Yamato;Chapuis, Yves-Andre;Fujita, Hiroyuki
本文报道了一种基于阵列微机电系统（MEMS）的执行器的设计、制造和控制，该执行器通过产生和控制气流力场来实现分布式微操作。作者提出了一种新颖的气动微执行器设计，提高了前人研究的分布式平面微操作器的可靠性和耐用性。该制造工艺基于绝缘体上硅（SOI）晶圆和HF（氢氟酸）蒸汽释放，这也显著提高了35 x 35 mm(2)的560微执行器阵列器件的产量。研究了通过悬架整形工艺实现静电驱动拉入电压的最小化，并成功验证了其提高电效率的有效性。研究了一种既能获得良好的输送性能又能降低运动控制不稳定性的分布式控制方法。为了验证集成传感器、智能和微执行器的未来智能结构的概念，我们选择了一种仿真方法来验证分布式活动表面上的分散控制策略。因此，采用了一种受自主移动机器人原理启发的集中/分散控制流程。采用c语言进行建模和实现。实验和表征结果验证了该控制方法具有良好的速度和承载性能。
This paper reports the design, fabrication and control of arrayed microelectromechanical systems (MEMS)-based actuators for distributed micromanipulation by generation and control of an air-flow force field. The authors present an original design of pneumatic microactuator, improving reliability and durability of a distributed planar micromanipulator described in the previous study. The fabrication process is based on silicon-on-insulator (SOI) wafer and HF (hydroflouric acid) vapor release, which also significantly increases the production yield of the 560 microactuator array device of 35 x 35 mm(2). Minimization of the electrostatic actuation pull-in voltage through suspension shaping fabrication was also studied, and successfully validated for electrical efficiency improvement. A distributed control method to achieve good conveyance performance and reduce motion control instability was investigated. An emulation approach was chosen to validate a decentralized control strategy on the distributed active surface in order to conduct a proof-of-concept of a future smart structure, integrating sensors, intelligence, and microactuators. Thus, a centralized/decentralized control flow, inspired by autonomous mobile robot principles, was applied. It was modeled and implemented using C-programming language. Experimental and characterization results validate the control method for feedback micromanipulation with good velocity and load capacity performance.