Modelling of SAW filter based on ZnO/diamond/Si layered structure including velocity dispersion
Modelling of SAW filter based on ZnO/diamond/Si layered structure including velocity dispersion
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DOI：
10.1016/s0169-4332(00)00338-x
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发表时间：
2000-09-01
影响因子：
6.7
通讯作者：
Alnot, P
中科院分区：
文献类型：
--
作者：
Assouar, MB;Elmazria, O;Alnot, P
基于模式耦合（COM）理论，以前开发的体衬底表面声波（SAW）器件建模的模拟器，修改为适用于分层结构。计算了ZnO/金刚石/Si-SAW滤波器的频率响应，并与文献中的实验结果进行了比较。一个很好的协议，获得的频率内和接近的滤波器的通带。在此通带之外，实验频率响应表现出不对称性，这是模拟无法再现的。这种不对称性是由于色散，作为频率的函数，SAW速度（VP）和机电耦合系数（K-2），这是不能忽略的情况下，分层结构。在为体结构开发的原始程序中，K-2和V被假定为常数。为了考虑色散的影响，通过引入色散模型对程序进行了修改。通过模拟，包括色散模型，并通过实验测量得到的结果之间的对抗显示出良好的一致性。(C)2000 Elsevier Science B. V.保留所有权利。
A simulator based on the coupling of mode (COM) theory, previously developed for modelling the bulk substrate surface acoustic wave (SAW) devices, was modified to be adapted for layered structures. The frequency response of ZnO/diamond/Si-SAW filter was calculated and the results were compared with experimental ones extracted from the literature. A good agreement is obtained for the frequencies within and close to the pass-band of the filter. Outside of this pass-band, the experimental frequency response exhibits an asymmetry, which is not reproduced by the simulation. This asymmetry is attributed to the dispersion, as a function of frequency, of SAW velocity (V-P) and electromechanical coupling coefficient (K-2), which cannot be neglected in the case of layered structures. In the original program developed for bulk structures, K-2 and V were assumed to be constant. To take into account the effect of dispersion, the program was modified by the introduction of a dispersive model. The confrontation between the results obtained by simulation, including the dispersive model, and by experimental measurements shows a good agreement. (C) 2000 Elsevier Science B.V. All rights reserved.