Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring
Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring
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DOI：
10.1002/adma.201701985
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发表时间：
2017-10-18
影响因子：
29.4
通讯作者：
Javey, Ali
中科院分区：
文献类型：
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作者：
Gao, Yuji;Ota, Hiroki;Javey, Ali
柔性压力传感器在可穿戴电子产品、机器人、健康监测等领域有许多潜在的应用。特别是基于液态金属的传感器尤其有前途，因为它们可以承受超过200%的应变而不会失效。然而，目前基于液体金属的应变传感器无法解决几个kPa范围内的小压力变化，这使得它们不适合心率监测等需要低得多的压力检测分辨率的应用。本文演示了一种基于嵌入式Galinstan微通道（70 μ m宽x 70 μ m高）的微流控触觉膜片压力传感器，该传感器能够以低于100 μ Pa的检测限和90 ms的响应时间分辨低于50 Pa的压力变化。嵌入式等效惠斯顿电桥电路充分利用切向和径向应变场，导致输出电压变化0.0835 kPa（-1）的高灵敏度。Wheatstone电桥还提供温度自补偿，允许在20-50摄氏度范围内操作。作为潜在应用的示例，演示了带有嵌入式微流体膜片压力传感器的聚二甲基硅氧烷（PDMS）腕带，该腕带能够进行实时脉冲监测，以及具有多个嵌入式传感器的PDMS手套，该手套在触摸或握住物体时提供全面的触觉反馈。
Flexible pressure sensors have many potential applications in wearable electronics, robotics, health monitoring, and more. In particular, liquid-metal-based sensors are especially promising as they can undergo strains of over 200% without failure. However, current liquid-metal-based strain sensors are incapable of resolving small pressure changes in the few kPa range, making them unsuitable for applications such as heart-rate monitoring, which require a much lower pressure detection resolution. In this paper, a microfluidic tactile diaphragm pressure sensor based on embedded Galinstan microchannels (70 mu m width x 70 mu m height) capable of resolving sub-50 Pa changes in pressure with sub-100 Pa detection limits and a response time of 90 ms is demonstrated. An embedded equivalent Wheatstone bridge circuit makes the most of tangential and radial strain fields, leading to high sensitivities of a 0.0835 kPa(-1) change in output voltage. The Wheatstone bridge also provides temperature self-compensation, allowing for operation in the range of 20-50 degrees C. As examples of potential applications, a polydimethylsiloxane (PDMS) wristband with an embedded microfluidic diaphragm pressure sensor capable of real-time pulse monitoring and a PDMS glove with multiple embedded sensors to provide comprehensive tactile feedback of a human hand when touching or holding objects are demonstrated.