Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology
Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology
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DOI：
10.1088/0960-1317/14/3/002
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发表时间：
2004-03-01
影响因子：
2.3
通讯作者：
Renaud, P
中科院分区：
文献类型：
--
作者：
Metz, S;Trautmann, C;Renaud, P
本文报道了聚酰亚胺微流控器件的光刻和层转移叠层技术。通过将未固化的聚酰亚胺薄膜层压在部分固化层上并随后进行亚胺化来密封微通道。用数百MeV的重离子照射微通道的选定区域，生成的离子轨迹被化学蚀刻成高纵横比的亚微米孔。离子束参数和径迹刻蚀条件决定了孔的密度、长度、直径和形状。通过反流过滤实验验证了膜的渗透性和分离性能。该装置可用于选择性地向生物组织输送或探测液体，例如，药物输送或微透析。对于基于芯片的设备，过滤器可以用作样品预处理单元，用于过滤或浓缩颗粒或分子。
This paper reports on polyimide microfluidic devices fabricated by photolithography and a layer transfer lamination technology. The microchannels are sealed by laminating an uncured polyimide film on a partially cured layer and subsequent imidization. Selected areas of the microchannels were irradiated with heavy ions of several hundred MeV and the generated ion tracks are chemically etched to submicron pores of high aspect ratio. The ion beam parameters and the track etching conditions define density, length, diameter and shape of the pores. Membrane permeability and separation performance is demonstrated in cross-flow filtration experiments. The devices can be used for selective delivery or probing of fluids to biological tissue, e.g. drug delivery or microdialysis. For chip-based devices the filters can be used as a sample pre-treatment unit for filtration or concentration of particles or molecules.