斜入射ホログラフィ干渉による機械部品の面形状・精度の測定 : 第1報, 測定対象面の撮影像と実際の被測定面上の位置対応
斜入射ホログラフィ干渉による機械部品の面形状・精度の測定 : 第1報, 測定対象面の撮影像と実際の被測定面上の位置対応
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利用斜入射全息干涉测量机械零件的表面形状和精度：第1部分，被测表面拍摄图像与被测表面实际位置的对应关系
DOI：
10.1299/kikaic.58.295
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发表时间：
1992
期刊：
影响因子：
--
通讯作者：
充男 鈴木
中科院分区：
文献类型：
--
作者：
博重 藤尾;愛三 久保;茂昭 栃本;英幸 花木;義昭 斉藤;充男 鈴木
In interferometry measurement using laser holography, it is not easy to find a definite relation between the measured image pattern and the topography of the actual surface. The main reason is that each of the measuring object, measurig apparatus, electronic data processor and CRT display has its own coordinate system, and the transformig or mapping relation between them is obscure. In this report, measured image of some test pieces with plane and cylindrical surfaces were compared with their simulated figure. Subsequently, tooth flank of a gear, which is a three-dimensional curved suface in which high accuracy in form is required, was chosen as the object of measurement. To obtain the relation between each coordinate system of a measuring object, of optical parts in the measuring appartus and of the image on a CRT, a method is proposed which requires the simulated contour of the diffracted figure of the objective curved surface to be measured corresponding to and fitting the actually measured and observed image pattern on the CRT. The experimental and simulated results indicate that the pixel position of the image on the CRT can correspond to the coordinate value of the tooth flank, and that the transformation of the measured image on the CRT to the error surface of tooth flank defined on the plane of action of the gear, i. e., to the tooth form chart and to the tooth trace form chart, is possible.
