First-generation hybrid MEMS gas chromatograph
First-generation hybrid MEMS gas chromatograph
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DOI：
10.1039/b508596a
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发表时间：
2005-01-01
期刊：
影响因子：
6.1
通讯作者：
Zellers, ET
中科院分区：
文献类型：
--
作者：
Lu, CJ;Steinecker, WH;Zellers, ET
本文介绍了一种微型混合型气相色谱仪的制造、组装和初步测试。mu GC具有机载校准、样品预浓缩和聚焦热解吸、程序升温分离以及集成微传感器阵列的“光谱”检测功能，旨在快速测定痕量浓度的复杂环境污染物混合物。环境空气用作载气，以避免对机载气体供应的需要。该微系统是铅垂通过蚀刻硅/玻璃微流体互连基板与熔融石英毛细管，并采用了一个微型商业泵和阀子系统，用于引导样品流。每个系统组件的最新性能数据，然后从工作的微系统的第一个分析结果。权衡系统性能作为体积流量的函数进行了探讨。典型的室内空气污染物的11-蒸汽混合物在不到90秒的测定表明，在低的十亿分之一浓度范围内的预浓缩空气样品体积为0.25 L的预测检测限。
The fabrication, assembly, and initial testing of a hybrid microfabricated gas chromatograph (mu GC) is described. The mu GC incorporates capabilities for on-board calibration, sample preconcentration and focused thermal desorption, temperature-programmed separations, and "spectral'' detection with an integrated array of microsensors, and is designed for rapid determinations of complex mixtures of environmental contaminants at trace concentrations. Ambient air is used as the carrier gas to avoid the need for on-board gas supplies. The microsystem is plumbed through an etched-Si/glass microfluidic interconnection substrate with fused silica capillaries and employs a miniature commercial pump and valve subsystem for directing sample flow. The latest performance data on each system component are presented followed by first analytical results from the working microsystem. Tradeoffs in system performance as a function of volumetric flow rate are explored. The determination of an 11-vapor mixture of typical indoor air contaminants in less than 90 s is demonstrated with projected detection limits in the low part-per-billion concentration range for a preconcentrated air-sample volume of 0.25 L.