Structure and Tribological Properties of CrTiAlN Coatings Deposited by Multi-Arc Ion Plating
Structure and Tribological Properties of CrTiAlN Coatings Deposited by Multi-Arc Ion Plating
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DOI：
10.1088/1009-0630/13/1/12
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发表时间：
2011-02
影响因子：
1.7
通讯作者：
Canxin 灿鑫 Tian 田;B. Yang 杨;Jun 俊 He 何;Hongjun 红军 Wang 王;Z. Wang 王;Guangfu 广甫 Wang 王;D. Fu 付
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文献类型：
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作者：
Canxin 灿鑫 Tian 田;B. Yang 杨;Jun 俊 He 何;Hongjun 红军 Wang 王;Z. Wang 王;Guangfu 广甫 Wang 王;D. Fu 付
采用自行研制的工业化多弧离子镀系统制备了CrTiAlN涂层。涂层是由面心立方结构的CrN和TiN组成。薄膜的表面粗糙度，显微硬度和摩擦学性能的显着影响的氮气压力和直流脉冲偏压施加到基板上。当氮气压力为5.0 Pa，偏压为−200 V时，可获得表面最光滑的CrTiAlN涂层，其硬度为2900 HV 0.05，与硬质合金的平均摩擦系数为0.16，磨损率为1.5×10-16 m3/N·m。
CrTiAlN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and tribological properties of the films were significantly affected by the nitrogen pressure and dc-pulsed bias voltage applied to the substrate. The CrTiAlN coatings with the smoothest surfaces were obtained at optimum conditions of nitrogen pressure of 5.0 Pa and bias voltage of −200 V. The samples were found to exhibit a hardness of 2900 HV0.05 with an average friction coefficient of 0.16 and wear rate of 1.5×10-16 m3/N·m against cemented carbide.