Optical scanner using a MEMS actuator
Optical scanner using a MEMS actuator
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使用 MEMS 致动器的光学扫描仪
DOI：
10.1016/s0924-4247(02)00302-3
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发表时间：
2002
影响因子：
4.6
通讯作者：
Stephen W. Smith
中科院分区：
文献类型：
--
作者：
J. Zara;Stephen W. Smith
光学扫描仪有许多应用，从工业中的条形码阅读器和激光打印机到医学中的角膜表面重建和光学相干断层扫描。我们已经开发出一种光学扫描器制造使用光刻聚酰亚胺基板上。该扫描仪使用静电微机电系统（MEMS）致动器来倾斜放置在3μm厚的聚酰亚胺扭转铰链上的镀金镜，以控制光束。所使用的线性致动器是集成力阵列（IFA），这是一个由数十万个可变形电容器组成的网络，这些电容器在施加差分电压的情况下静电收缩。IFA是2.2μm厚的图案化金属化聚酰亚胺薄膜，长1 cm，宽1 mm或3 mm，具体取决于应用。使用一维梁理论和ANSYS有限元分析对反射镜支撑结构进行建模，然后使用硅晶片上的聚酰亚胺和金的三层工艺制造。侧扫描结构已制成1.125或2.25mm宽的工作台。完成的器械涂有500 μ m厚的聚对二甲苯保形涂层，以保护其免受环境影响。这些设备已证明，在高达± 50 V的施加电压下，光学扫描角度可达146°。这些设备也被用于引导原型条形码阅读器中的激光束，以展示其功能。
Optical scanners have numerous applications from bar code readers and laser printers in industry to corneal resurfacing and optical coherence tomography in medicine. We have developed an optical scanner fabricated using photolithography on a polyimide substrate. This scanner uses an electrostatic microelectromechanical system (MEMS) actuator to tilt a gold-coated mirror resting on 3μm thick polyimide torsion hinges to steer an optical beam. The linear actuator used is the integrated force array (IFA), a network of hundreds of thousands of deformable capacitors, which electrostatically contract with an applied differential voltage. IFAs are 2.2μm thick patterned, metallized polyimide films 1cm long and either 1 or 3mm wide depending on the application. The mirror support structures were modeled using one-dimensional beam theory and ANSYS finite element analysis and then fabricated using a three-layer process with polyimide and gold on silicon wafers. Side scanning structures have been fabricated with tables 1.125 or 2.25mm wide. The completed devices were coated with a 500Å thick conformal coating of parylene for protection from the environment. These devices have demonstrated optical scan angles up to 146° for applied voltages up to ±50V. These devices were also used to steer a laser beam in a prototype bar code reader to demonstrate functionality.