Electro-optical characterization of epitaxial and polycrystalline CoSi2 Schottky diodes
Electro-optical characterization of epitaxial and polycrystalline CoSi2 Schottky diodes
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外延和多晶 CoSi2 肖特基二极管的电光特性
DOI:
10.1117/12.218245
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发表时间:
1995
期刊:
影响因子:
--
通讯作者:
R. Mertens
中科院分区:
文献类型:
--
作者:
E. Roca;K. K. Larsen;S. Kolodinski;R. Mertens
The infrared response of polycrystalline and epitaxial CoSi2/Si Schottky diodes with similar silicide thickness has been measured. For the polycrystalline diodes the quantum efficiency is found to be two times higher than for the epitaxial diodes, although both types of diodes present very similar barrier height. The observed improvement is attributed to grain boundary scattering of the excited carriers.