Electron transport of amorphous hydrogenated silicon-carbon alloy films prepared by glow discharge decomposition
Electron transport of amorphous hydrogenated silicon-carbon alloy films prepared by glow discharge decomposition
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辉光放电分解制备非晶氢化硅碳合金薄膜的电子输运
DOI:
10.1016/0165-1633(91)90139-c
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发表时间:
1991
期刊:
影响因子:
--
通讯作者:
J. Shirafuji
中科院分区:
文献类型:
--
作者:
T. Enomoto;R. Hattori;J. Shirafuji