Performance of low-voltage STEM/TEM with delta corrector and cold field emission gun.
Performance of low-voltage STEM/TEM with delta corrector and cold field emission gun.
复制标题
DOI：
10.1093/jmicro/dfq027
复制
发表时间：
2010-08
期刊：
影响因子：
--
通讯作者：
Takeo Sasaki;H. Sawada;F. Hosokawa;Y. Kohno;T. Tomita;T. Kaneyama;Y. Kondo;K. Kimoto;Y. Sato;K. Suenaga
中科院分区：
文献类型：
--
作者：
Takeo Sasaki;H. Sawada;F. Hosokawa;Y. Kohno;T. Tomita;T. Kaneyama;Y. Kondo;K. Kimoto;Y. Sato;K. Suenaga
为了减少由电子束引起的辐射损伤，并获得高对比度的图像的标本，我们已经开发出一种高度稳定的透射电子显微镜配备了冷场发射枪和球面像差校正器的图像和探针形成系统，它在较低的加速电压比传统的透射电子显微镜。设计了一种三角形像差校正器，可同时补偿三级球差和五级六倍像散。在30-60 kV范围内，两者在扫描透射电子显微镜（STEM）和透射电子显微镜（TEM）模式下都得到了成功补偿。Si[110]样品的原始高角度环形暗场（HAADF）图像的傅立叶变换分别显示了30和60 kV下对应于111和96 pm晶格间距的斑点，并且具有金颗粒的非晶Ge膜的原始TEM图像的傅立叶变换分别显示了30和60 kV下对应于91和79 pm间距的斑点。利用HAADF-STEM成像技术对碳基样品Er@C（82）掺杂单壁碳纳米管进行了原子级分辨率的观测。
To reduce radiation damage caused by the electron beam and to obtain high-contrast images of specimens, we have developed a highly stabilized transmission electron microscope equipped with a cold field emission gun and spherical aberration correctors for image- and probe-forming systems, which operates at lower acceleration voltages than conventional transmission electron microscopes. A delta-type aberration corrector is designed to simultaneously compensate for third-order spherical aberration and fifth-order 6-fold astigmatism. Both were successfully compensated in both scanning transmission electron microscopy (STEM) and transmission electron microscopy (TEM) modes in the range 30-60 kV. The Fourier transforms of raw high-angle annular dark field (HAADF) images of a Si[110] sample revealed spots corresponding to lattice spacings of 111 and 96 pm at 30 and 60 kV, respectively, and those of raw TEM images of an amorphous Ge film with gold particles showed spots corresponding to spacings of 91 and 79 pm at 30 and 60 kV, respectively. Er@C(82)-doped single-walled carbon nanotubes, which are carbon-based samples, were successfully observed by HAADF-STEM imaging with an atomic-level resolution.