Control strategy of fan filter units based on personnel position in semiconductor fabs
Control strategy of fan filter units based on personnel position in semiconductor fabs
复制标题
半导体工厂基于人员位置的风扇过滤单元控制策略
DOI：
10.1016/j.buildenv.2022.109420
复制
发表时间：
2022-07
影响因子：
7.4
通讯作者：
Wei Xu
中科院分区：
文献类型：
--
作者：
Jiaan Zhao;Chenjiyu Liang;Huan Wang;Xianting Li;Wei Xu
To meet the high environmental requirements of semiconductor manufacturing, fabs operate at a huge air volume that is designed under the most unfavorable condition, resulting in extremely high energy consumption. In this study, a new control strategy of fan filter units (FFUs) based on personnel position was proposed to reduce the operating air volume, i.e., higher air supply velocity around personnel and lower air supply velocity far from the personnel. And then a computational fluid dynamics (CFD) model was established to simulate the particle distribution under different scenarios. The specific supply air velocity of FFUs above the personnel and other areas were determined with the scenario that only one personnel stands in cleanroom. More scenarios with multiple personnel and personnel moving around were used to verify the effectiveness of proposed control strategy. The results show that supply air velocities of 0.35 m/s around personnel and 0.15 m/s and far from the personnel can guarantee the same level of cleanliness as the conventional constant air volume method (i.e., air supply velocity of all FFUs at 0.35 m/s). With the proposed control strategy, the required air volume can be significantly decreased by 42–55.3% under different working conditions. The proposed strategy has the advantage of high energy savings and emission reduction in semiconductor fabs. • Particle sources are not uniformly distributed in semiconductor fabs. • Particle emission from occupants contributes the most to the cleanliness. • Decreasing supply air volume far away from occupants can maintain the cleanliness. • Supply air focusing on occupants can reduce air volume by 42–55.3%. • Indoor positioning systems may save a lot of energy in semiconductor fabs.
登录
查看更多内容
DOI：
10.3390/s17081927
发表时间：
2017-08-22
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Correa A;Barcelo M;Morell A;Vicario JL
通讯作者：
Vicario JL
DOI：
10.1109/ismss.1993.263699
发表时间：
1993
期刊：
[1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium
影响因子：
--
作者：
S. AbuZeid
通讯作者：
S. AbuZeid
影响因子：
6.7
作者：
K. Kircher;X. Shi;Samved Patil;K. M. Zhang
通讯作者：
K. Kircher;X. Shi;Samved Patil;K. M. Zhang
影响因子：
4
作者：
Lin, Ti;Tung, Yun-Chun;Lin, Chen-Yen
通讯作者：
Lin, Chen-Yen
影响因子：
9
作者：
Shih-cheng Hu;Y. Chuah
通讯作者：
Shih-cheng Hu;Y. Chuah