Properties of transparent conducting oxides formed from CdO and ZnO alloyed with SnO2 and In2O3
Properties of transparent conducting oxides formed from CdO and ZnO alloyed with SnO2 and In2O3
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DOI：
10.1116/1.580429
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发表时间：
1997-05
期刊：
影响因子：
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通讯作者：
X. Wu;T. Coutts;W. P. Mulligan
中科院分区：
文献类型：
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作者：
X. Wu;T. Coutts;W. P. Mulligan
在这篇文章中，我们研究了几种三元合金薄膜的结构，电学和光学性质。合金是氧化锌和氧化镉，它们中的每一种都与氧化铟和氧化锡反应以形成溅射靶。该膜通过射频溅射沉积。X射线衍射光谱表明，锡酸镉，铟酸镉，锡酸锌薄膜都是多晶尖晶石相，但只有当沉积在室温下在纯氧，然后在氩气/硫化镉退火。第四种合金，铟酸锌，在相同的条件下制备时，表现出六方相。锡酸镉是所有透明导电氧化物（TCO）中折射率最低的材料之一，在可见光谱中具有低吸收率，是电学和光学要求之间的极佳折衷。对于这种材料，我们表明，单相是必不可少的最高的电导率和最低的光吸收。锡酸锌具有莫尔。
In this article we examine the structural, electrical, and optical properties of several ternary alloy thin films. The alloys are zinc oxide and cadmium oxide, each of which was reacted with both indium oxide and tin oxide to form sputtering targets. The films were deposited by rf sputtering. X-ray diffraction spectroscopy showed that cadmium stannate, cadmium indate, and zinc stannate films were all polycrystalline spinel phase, but only when deposited at room temperature in pure oxygen and then annealed in argon/cadmium sulfide. The fourth alloy, zinc indate, exhibited a hexagonal phase when prepared under identical conditions. Cadmium stannate has one of the lowest resistivities of any transparent conducting oxide (TCO), has low absorbance in the visible spectrum, and is an excellent compromise between electrical and optical requirements. For this material, we show that a single phase is essential for the highest electrical conductivity and lowest optical absorbance. Zinc stannate has a resistivity mor...