Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning
Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning
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DOI：
10.1109/jmems.2009.2016275
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发表时间：
2009-06-01
影响因子：
2.7
通讯作者：
Chu, Patrick B.
中科院分区：
文献类型：
--
作者：
Lee, Ju-Il;Huang, Xinghui;Chu, Patrick B.
This paper presents a microelectromechanical systems (MEMS) capacitive position sensor for nanopositioning applications in Probe storage systems. The objective of the sensor system design is to develop a high-precision X-Y linear and rotational position sensor with a minimum sensor area and a large range of movements at high speed. To achieve this, first, a simple sensor noise model scalable with a sensor area was developed, in which all the parasitic capacitances are taken into account. Furthermore, a signal-processing solution was developed to compensate for the nonlinearities caused by rotational disturbances and, at the same time, to generate a rotational position signal for active rotation-control purposes. A MEMS capacitive sensor prototype was constructed with the design of a 13-mu m pitch, a 300-mu m peak-to-peak linear stroke, and a 3.46-mm(2) sensor area at a 3-mu m gap. The measured sensor noise was 0.2 nm 1 sigma, which corresponds to 12 mu deg 1 sigma for the fabricated prototype sensor, at 25-kHz bandwidth. Furthermore, the signal linearity was significantly enhanced by the proposed sensor signal processing, with a measured sensor signal nonlinearity of 0.78% for an 80-mu m peak-to-peak stroke at 200 Hz. Finally, the capacitive sensor-based dynamic closed-loop X-Y linear and rotational position control of an electromagnetic scanner was successfully demonstrated. [2008-0200]
