Multi-Method High-Resolution Surface Analysis with Slow Electrons
Multi-Method High-Resolution Surface Analysis with Slow Electrons
复制标题
使用慢电子的多方法高分辨率表面分析
DOI：
10.1007/978-3-662-07766-5_8
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
T. Schmidt
中科院分区：
文献类型：
--
作者：
E. Bauer;T. Schmidt
使用快速电子的电子显微镜已经达到了高度的复杂状态，不仅可以进行原子分辨率的结构成像，还可以进行亚纳米范围的化学分析，以及使用洛伦兹显微镜和低于10纳米的全息成像。这些可能性是由于强的弹性前向散射、沿电子路径的信号积累以及所使用的电子光学元件的小像差。在表面成像中，信号必须来自一个小的深度和快速电子是有用的，只有少数成像模式，强调表面特征。例如弱光束成像，二次电子发射显微镜和反射电子显微镜，反射电子显微镜是最通用的。与其试图通过采用强调表面信号贡献的操作模式来克服快速电子的低表面灵敏度，不如寻求电子只与表面相互作用的条件。这就是电子能量非常低的情况，这导致了1962年低能电子显微镜（LEEM）的想法。这一领域到1993年为止的历史已经回顾过[1]，这里不再重复。只讨论电子-表面相互作用的原理、基本的电子-光学问题、LEEM的扩展到自旋极化LEEM (SPLEEM)，最重要的是LEEM与光谱光发射电子显微镜（SPELEEM）的结合，后者的发展得到了大众汽车基金会的支持。成像总是可以与局部光谱学和衍射相结合，从而可以非常全面地表征表面。
Electron microscopy with fast electrons has reached a high state of sophistication allowing not only structural imaging with atomic resolution but also chemical analysis in the sub-nanometre range and magnetic imaging with Lorentz microscopy and holography below ten nonometres. These possibilities are due to the strong elastic forward scattering, to the signal accumulation along the path of the electron and to the small aberrations of the employed electron optical elements. In surface imaging, the signal must come from a small depth and fast electrons are useful in only a few imaging modes that emphasize the surface features. Examples are weak-beam imaging, secondary electron emission microscopy and reflection electron microscopy, the last being the most versatile.Instead of trying to overcome the low surface sensitivity of fast electrons by employing modes of operation that emphasize the signal contributions from the surface, it appears logical to seek conditions under which electrons interact only with the surface. This is the case at very low electron energies, which led in 1962 to the idea of low-energy electron microscopy (LEEM). The history of this field up to 1993 has been reviewed [1 J and will not be repeated here. Only the principles of the electron-surface interaction, the basic electron-optical problems, the extension of LEEM to Spin-Polarized LEEM (SPLEEM) and, foremost of all, the combination of LEEM with Spectroscopic Photo Emission Electron Microscopy (SPELEEM), the development of which was supported by the Volkswagen Foundation, will be discussed. Imaging can always be combined with local spectroscopy and diffraction so that a very comprehensive surface characterization is possible.
DOI：
10.3131/jvsj2.57.382
发表时间：
2014
期刊：
Journal of The Vacuum Society of Japan
影响因子：
--
作者：
T. Koshikawa;Masahiko Suzuki;T. Yasue;E. Bauer;T. Nakanishi;X. Jin;Y. Takeda
通讯作者：
T. Koshikawa;Masahiko Suzuki;T. Yasue;E. Bauer;T. Nakanishi;X. Jin;Y. Takeda