Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna
Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna
复制标题
通过驼峰可变间隙螺旋天线提高射频等离子体密度的均匀性
DOI：
10.1088/1674-1056/17/11/047
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发表时间：
2008
影响因子：
1.7
通讯作者：
Li Lin-Sen
中科院分区：
文献类型：
--
作者：
Liang Rong-Qing;Liu Feng;Zhou Qian-Hong;Xu Xu;Li Lin-Sen
研制了一种变间隙顶部电感耦合等离子体驼峰螺旋天线。通过与平面螺旋天线的比较，研究了驼峰螺旋天线的电磁场结构计算和实验结果。结果表明，驼峰天线改善了等离子体密度在径向上的均匀性，降低了顶部电感耦合等离子体中的电子温度。通过实验和理论分析，认为驼峰天线情况下的等离子体性能是均匀电磁位形和降低的电容耦合效应共同作用的结果。
This paper develops a humped spiral antenna of top inductively coupled plasma with variable gap. Comparing with planar spiral antennae, it investigates the performance of humped spiral antennae in the calculated electromagnetic configurations and experimental results. It finds that the humped antenna has the improved uniformity of plasma density in the radial direction and the decreased electron temperature in the top inductively coupled plasma. By experimental and theoretical analyses, the plasma performance in the case of humped antennae is considered to be the combined results of the uniform electromagnetic configurations and the depressed capacitively coupling effect.