Automatic real-time guidance of laser machining with inline coherent imaging
Automatic real-time guidance of laser machining with inline coherent imaging
复制标题
利用内联相干成像自动实时引导激光加工
DOI：
--
复制
发表时间：
2011
期刊：
影响因子：
--
通讯作者：
J. Fraser
中科院分区：
文献类型：
--
作者：
P. Webster;Logan G. Wright;K. Mortimer;Ben Y. C. Leung;Joe X. Z. Yu;J. Fraser
光学相干成像可以在激光钻孔过程中实时（>20 kHz）测量孔深，而不会被强烈的加工光或非相干等离子体辐射所遮蔽。 快速测量蚀刻速率和随机熔融弛豫使这些图像可用于各种材料的工艺开发和质量控制，包括金属，半导体和半导体。通过对成像光透明的材料中的烧蚀坑成像的能力允许引导盲孔切割，即使在样品的先验知识有限的情况下。之前已经证明，通过应用来自该成像的手动反馈，孔深准确度可以显着提高[PJ L。韦伯斯特等人，选择Lett. 35，646（2010）]。然而，大量的原始数据和计算开销是相干成像作为一种真正的自动反馈机制的应用的障碍。此外，高性能的相干成像系统的组件设计，为他们的传统…
Optical coherence imaging can measure hole depth in real-time (>20 kHz) during laser drilling without being blinded by intense machining light or incoherent plasma emissions. Rapid measurement of etch rate and stochastic melt relaxation makes these images useful for process development and quality control in a variety of materials including metals, semiconductors, and dielectrics. The ability to image through the ablation crater in materials transparent to imaging light allows the guidance of blind hole cutting even with limited a priori knowledge of the sample. Significant improvement in hole depth accuracy with the application of manual feedback from this imaging has been previously demonstrated [P. J. L. Webster et al., Opt. Lett. 35, 646 (2010)]. However, the large quantity of raw data and computing overhead are obstacles for the application of coherent imaging as a truly automatic feedback mechanism. Additionally, the high performance components of coherent imaging systems designed for their traditio...