The importance of pressure and mass ratios when depositing multi-element oxide thin films by pulsed laser deposition
The importance of pressure and mass ratios when depositing multi-element oxide thin films by pulsed laser deposition
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DOI：
10.1016/j.apsusc.2016.07.003
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发表时间：
2016-12-15
影响因子：
6.7
通讯作者：
Wokaun, Alexander
中科院分区：
文献类型：
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作者：
Ojeda-G-P, Alejandro;Schneider, Christof W.;Wokaun, Alexander
通过对BaTiO_3、CaTiO_3、La0.4Ca0.6MnO_3、EuAlO_3和LiMn2O_4的角度分辨厚度和成分分析，研究了沉积多元氧化物材料时背景气压的影响。随着气压的增加，典型的正向沉积在所有角度上都变为恒定厚度。相对于靶的成分变化显示了(按影响的顺序)：靶材料、沉积压力和角度位置(衬底尺寸)的依赖关系。靶材质量比与成分偏差之间存在线性关系。在某些压力条件下，对于大质量比，这可能会导致高达70%的组成偏差。(C)2016爱思唯尔B.V.保留所有权利。
Angle-resolved thickness and compositional analyses of BaTiO3, CaTiO3, La0.4Ca0.6MnO3, EuAlO3, and LiMn2O4 were performed to study the influence of the background gas pressure when depositing multi elemental oxide materials. With increasing gas pressure the typical forward directed deposition changes to a constant thickness at all angles. Compositional changes with respect to the target show dependencies on (in order of influence): target material, deposition pressure, and angular location (substrate size). A linear relationship was found between target mass-ratios and compositional deviations. This can lead to compositional deviations of up to 70% for large mass-ratios in certain pressure regimes. (C) 2016 Elsevier B.V. All rights reserved.