Metrology and instrumentation challenges with high-rate, roll-to-roll manufacturing of flexible electronic systems
Metrology and instrumentation challenges with high-rate, roll-to-roll manufacturing of flexible electronic systems
复制标题
柔性电子系统的高速卷对卷制造给计量和仪器带来挑战
DOI:
10.1117/12.940778
复制
发表时间:
2012
影响因子:
3.6
通讯作者:
Ray T. Chen
中科院分区:
文献类型:
--
作者:
H. Subbaraman;Xiaohui Lin;Xiaochuan Xu;A. Dodabalapur;L. Guo;Ray T. Chen
In this paper, we discuss the metrology and instrumentation challenges that need to be overcome in order to realize true implementation of roll-to-roll manufacturing of flexible electronic systems. Several metrology and instrumentation challenges involved such as availability of particulate-free high quality substrate, development and implementation of high-speed in-line and off-line inspection and diagnostic tools with adaptive control for patterned and unpatterned material films, development of reliable hardware, etc need to be addressed and overcome in order to realize a successful manufacturing process. Due to extreme resolution requirements compared to print media, the burden of software and hardware tools on the throughput also needs to be carefully determined. Moreover, the effect of web wander and variations in web speed need to accurately be determined in the design of the system hardware and software. Realization of successful metrology and instrumentation by overcoming the challenges for the development of a roll-to-roll manufacturing system for flexible electronic systems opens limitless possibilities for the deployment of high performance flexible electronic components in a variety of applications including communication, sensing, medicine, agriculture, energy, lighting etc.