Grand challenges in low temperature plasmas
Grand challenges in low temperature plasmas
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DOI：
10.3389/fphy.2022.1040658
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发表时间：
2022-10-14
影响因子：
3.1
通讯作者：
Ostrikov, Kostya (Ken)
中科院分区：
文献类型：
--
作者：
Lu, XinPei;Bruggeman, Peter J.;Ostrikov, Kostya (Ken)
低温等离子体（LTP）能够在接近环境温度下产生高度反应性的环境，这是由于具有在1至10 eV（1 eV = 11600 K）范围内的典型动能的高能电子，其被用于从电子芯片的等离子体蚀刻和增材制造到等离子体辅助燃烧的应用。LTP是许多先进技术的核心。如果没有LTP，现代社会的许多便利将不复存在。LTP的新应用不断被提出。在这些新应用转化为实践之前，研究人员面临着许多重大挑战。在本文中，我们将讨论LTP领域面临的挑战，特别是大气压等离子体，重点关注健康，能源和可持续性。
Low temperature plasmas (LTPs) enable to create a highly reactive environment at near ambient temperatures due to the energetic electrons with typical kinetic energies in the range of 1 to 10 eV (1 eV = 11600K), which are being used in applications ranging from plasma etching of electronic chips and additive manufacturing to plasma-assisted combustion. LTPs are at the core of many advanced technologies. Without LTPs, many of the conveniences of modern society would simply not exist. New applications of LTPs are continuously being proposed. Researchers are facing many grand challenges before these new applications can be translated to practice. In this paper, we will discuss the challenges being faced in the field of LTPs, in particular for atmospheric pressure plasmas, with a focus on health, energy and sustainability.