Effect of drying conditions on patterned ceramic films processed by soft micromolding
Effect of drying conditions on patterned ceramic films processed by soft micromolding
复制标题
干燥条件对软微成型加工的图案化陶瓷薄膜的影响
DOI：
10.2109/jcersj2.118.321
复制
发表时间：
2010
影响因子：
1.1
通讯作者：
R. Bordia
中科院分区：
文献类型：
--
作者：
O. Guillon;C. Jamin;R. Bordia
使用软光刻技术来创建带图案的绿色陶瓷薄膜，其中包括具有明确几何形状的微米空隙。 PDMS 模具由高固含量水悬浮液（40-52% 体积）填充，并通过 SEM 和非接触式轮廓测定法评估工艺质量和薄膜生坯密度。干燥是关键步骤，因为由于水润湿弹性体而观察到有限的收缩。优化干燥条件以提高结构化薄膜的均匀性和绿色包装。高纵横比的受控几何特征可生产至微米级。图案薄膜有许多技术用途。在本研究中，我们使用这种方法引入受控缺陷并研究约束烧结和裂纹扩展。
A soft lithography technique was used to create patterned green ceramic films including micrometric voids of well-defined geometry. A PDMS mold was filled by high solid content aqueous suspension (40–52% vol.) and the process quality as well as the film green density were evaluated through SEM and non-contact profilometry. Drying is a critical step, as limited shrinkage was observed due to wetting of the elastomer by water. The drying conditions were optimized in order to increase the homogeneity and green packing of the structured films. Controlled geometry features of high aspect ratio were produced down to the micrometer scale. There are many technological uses of patterned films. In this study, we have used this approach to introduce controlled flaws and investigate constrained sintering and crack growth.