High-performance monolithic triaxial piezoresistive shock accelerometers
High-performance monolithic triaxial piezoresistive shock accelerometers
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DOI：
10.1016/j.sna.2007.10.032
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发表时间：
2008-02-15
影响因子：
4.6
通讯作者：
Feng, Songlin
中科院分区：
文献类型：
--
作者：
Dong, Peitao;Li, Xinxin;Feng, Songlin
为了满足高冲击三轴高精度测量的要求，研制了单片式高性能三轴压阻式加速度计，其测量范围为50,000-100,000×g。对于具有高灵敏度和高谐振频率的X轴和Y轴单元，提出了一种轴向应力微梁方案，而对于同样具有上述高性能的Z轴单元，则提出了一种三梁双质量结构。这三种传感元件通过双面深刻蚀和压阻工艺相结合的微机械加工技术实现了单片集成。该三轴加速度计的传感器芯片尺寸为4.4 mm×2.3 mm×1 mm。采用落杆系统对加速度计进行了表征。X轴、Y轴和Z轴的灵敏度分别为2.17、2.25和2.64微伏/克/5V，对应的谐振频率为308、303和164 kHz。针对落杆冲击系统，首次提出了一种基于时间域分离的方法，实现了十字轴灵敏度的精确测试。采用这种新的测量技术，三个轴向元件均获得了满意的横向灵敏度(不高于2.1%)，这为单片式三轴冲击加速度计的高性能提供了有利条件。(C)2007 Elsevier B.V.保留所有权利。
To meet the requirements of triaxial measurement of high-shock with a high accuracy, monolithic high-performance triaxial piezoresistive accelerometers are developed for 50,000-100,000 x g measure range. An axial-stressed tiny-beam scheme is developed for the X and Y axial elements that features both high sensitivity and high resonant frequency, while a three-beam twin-mass structure is developed for Z-axis element that also features aforementioned high performance. The three sensing elements are monolithically integrated by micromachining techniques of double-sided deep etching combined with piezoresistive processes. The sensor chip of the triaxial accelerometer is 4.4 mm x 2.3 mm x 1 mm in dimensions. A dropping-bar system is used to characterize the accelerometer. The sensitivity in X-, Y- and Z-axes are measured as 2.17, 2.25 and 2.64 mu V/g/5V, respectively, while the corresponding resonant frequency is 308, 303 and 164 kHz. With the dropping bar shocking system, a time-domain separation method is developed, for the first time, to realize precise test of the cross-axis sensitivity. With the novel measurement technique, satisfactory cross-axis sensitivity (not higher than 2.1%) is experimentally obtained for all the three axial elements, which contributes to the high performance of the monolithic triaxial shock accelerometers. (C) 2007 Elsevier B.V. All rights reserved.