High-throughput ptychography using Eiger: scanning X-ray nano-imaging of extended regions
High-throughput ptychography using Eiger: scanning X-ray nano-imaging of extended regions
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DOI：
10.1364/oe.22.014859
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发表时间：
2014-06-16
期刊：
影响因子：
3.8
通讯作者：
Menzel, Andreas
中科院分区：
文献类型：
--
作者：
Guizar-Sicairos, Manuel;Johnson, Ian;Menzel, Andreas
下一代光子计数像素探测器的像素尺寸更小，帧速率更高，为X射线相干衍射成像（CDI）的应用开辟了新的机会。在这篇手稿中，我们展示了快速图像采集重叠使用Eiger探测器。当以41nm分辨率对集成电子电路的500 μ m × 290 μ m区域成像时，我们实现了每秒25，000个以上的分辨率元件，或每个分辨率元件40 μ s的有效停留时间。我们进一步提出的应用程序的图像部分之间的共享信息的计划，允许的视野，以超出范围的压电扫描系统和要求的照明的稳定性被放宽。(C)2014年美国光学学会
The smaller pixel size and high frame rate of next-generation photon counting pixel detectors opens new opportunities for the application of X-ray coherent diffractive imaging (CDI). In this manuscript we demonstrate fast image acquisition for ptychography using an Eiger detector. We achieve above 25,000 resolution elements per second, or an effective dwell time of 40 mu s per resolution element, when imaging a 500 mu m x 290 mu m region of an integrated electronic circuit with 41 nm resolution. We further present the application of a scheme of sharing information between image parts that allows the field of view to exceed the range of the piezoelectric scanning system and requirements on the stability of the illumination to be relaxed. (C) 2014 Optical Society of America