Guided Three-Dimensional Catalyst Folding during Metal-Assisted Chemical Etching of Silicon
Guided Three-Dimensional Catalyst Folding during Metal-Assisted Chemical Etching of Silicon
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DOI：
10.1021/nl200715m
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发表时间：
2011-06-01
期刊：
影响因子：
10.8
通讯作者：
Scott, John Henry J.
中科院分区：
文献类型：
--
作者：
Rykaczewski, Konrad;Hildreth, Owen J.;Scott, John Henry J.
近年来，硅的金属辅助化学蚀刻（MaCE）被限制在金属催化剂模板周围的小区域内，已经成为一种有前途的低成本替代常用的三维（3D）制造技术。我们报道了一种利用MaCE将二维金属催化剂薄膜可控折叠成三维结构的新方法。该方法利用催化剂层的选择性图图化成特征尺寸不匹配的区域，导致沿缺口边线的不均匀蚀刻速率，从而产生用于3D折叠的铰链2D模板。我们探索了铰链模板折叠过程的动力学，证明折叠作用结合了催化剂模板的旋转和平移运动，从而产生具有紧密集成金属和硅特征的拓扑复杂的3D纳米结构。
In recent years metal-assisted chemical etching (MaCE) of silicon, in which etching is confined to a small region surrounding metal catalyst templates, has emerged as a promising low cost alternative to commonly used three-dimensional (3D) fabrication techniques. We report a new methodology for controllable folding of 2D metal catalyst films into 3D structures using MaCE. This method takes advantage of selective patterning of the catalyst layer into regions with mismatched characteristic dimensions, resulting in uneven etching rates along the notched boundary lines that produce hinged 2D templates for 3D folding. We explore the dynamics of the folding process of the hinged templates, demonstrating that the folding action combines rotational and translational motion of the catalyst template, which yields topologically complex 3D nanostructures with intimately integrated metal and silicon features.