Monolithic high aspect ratio two-axis optical scanners in SOI
Monolithic high aspect ratio two-axis optical scanners in SOI
复制标题
SOI 中的单片高纵横比两轴光学扫描仪
DOI：
10.1109/memsys.2003.1189734
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
B. Cagdaser
中科院分区：
文献类型：
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作者：
V. Milanovic;G.A. Matus;T. Cheng;B. Cagdaser
全单片硅光学扫描仪演示了两个轴上的大静态光束偏转。扫描仪的主要优点是两个轴的操作频率都很高。也就是说，致动器允许静止的双轴旋转，而不需要万向节或专门的隔离技术。每个器件由蚀刻在SOI晶片的器件层中的四个正交布置的垂直梳状驱动器旋转器致动，所述旋转器由机械连杆和机械旋转变压器耦合。变压器允许从梳状驱动行程有限的驱动器旋转的放大率为1.7/spl倍/角度的放大率更大的静态旋转。具有600 /spl mu/m的反射镜直径的装置对于x轴和y轴分别表现出4.9 kHz和6.52 kHz的最低谐振频率。对于<275 Vdc，x轴的静态光学偏转高达9.6/spl deg/，y轴的静态光学偏转高达7.2/spl deg/。另一种类型的装置，设计用于低压操作，对于<85 Vdc，表现出围绕x轴到10.8/spl deg/和围绕y轴到11.7/spl deg/的静态光学偏转。在同一装置中，最低共振频率为1.69 kHz（x轴）和2.43 kHz（y轴）。
Fully monolithic silicon optical scanners are demonstrated with large static optical beam deflection in two axes. The main advantage of the scanners is their high frequency of operation for both axes. Namely, the actuators allow static two-axis rotation of a micromirror without the need for gimbals, or specialized isolation technologies. Each device is actuated by four orthogonally-arranged vertical combdrive rotators etched in the device layer of an SOI wafer, which are coupled by mechanical linkages and mechanical rotation transformers. The transformers allow larger static rotations of the micromirror from the combdrive-stroke limited rotation of the actuators, with a magnification of 1.7/spl times/ angle demonstrated. A device with a mirror diameter of 600 /spl mu/m exhibits lowest resonant frequencies of 4.9 kHz and 6.52 kHz for x-axis and y-axis, respectively. The static optical deflection of the x-axis up to 9.6/spl deg/ and of the y-axis up to 7.2/spl deg/, are achieved for <275 Vdc. Another type of device, designed for lower-voltage operation exhibits static optical deflection about the x-axis to 10.8/spl deg/ and about the y-axis to 11.7/spl deg/, for <85 Vdc. In the same device, lowest resonant frequencies were 1.69 kHz for the x-axis and 2.43 kHz for the y-axis.