Mechanical and fracture toughness studies of amorphous SiC–N hard coatings using nanoindentation
Mechanical and fracture toughness studies of amorphous SiC–N hard coatings using nanoindentation
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使用纳米压痕技术研究非晶 SiC-N 硬质涂层的机械和断裂韧性
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
J. Barnard
中科院分区：
文献类型：
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作者：
T. Scharf;H. Deng;J. Barnard
采用Ar/N_2混合气体反应磁控溅射法在Si（111）和蓝宝石衬底上制备了a：SiCx-Ny薄膜。纳米压痕被用来表征机械（硬度和弹性模量）和断裂（韧性）性能。使用传统的锋利的布氏金刚石压头（三面棱锥）来评估机械性能。硬度和弹性模量略有增加，从23和220 GPa到27和270 GPa与N2的掺入（高达4.4%）。断裂韧性（Kc）的特征在于用立方角压头代替上述压头，立方角压头也是三角形的，但具有立方角的几何形状，在对称轴线和面之间具有较小的角度。切换的目的是降低与布氏和维氏压头相关的高得多的开裂阈值。较小体积的薄膜需要这种可靠性的减少。研究了中径向指数的形核与扩展。
a:SiCx–Ny films were deposited on Si(111) and sapphire substrates at ambient temperatures by reactive magnetron sputtering of SiC in a mixed Ar/N2 discharge. Nanoindentation was used to characterize the mechanical (hardness and elastic modulus) and fracture (toughness) properties. A conventional sharp Berkovich diamond indenter (three-sided pyramid) was used to assess the mechanical properties. The hardness and elastic modulus slightly increased from 23 and 220 GPa to 27 and 270 GPa with incorporation of N2 (up to 4.4%). The fracture toughness (Kc) was characterized by replacing the aforementioned indenter with a cube corner indenter, which also is trigonal but has the geometry of a cube corner with a smaller angle between the axis of symmetry and a face. The purpose of the switch was to reduce the much higher cracking thresholds associated with the Berkovich and Vickers indenters. The smaller volume of thin films requires this reduction for reliability. The nucleation and propagation of median-radial ind...