High efficiency transmission grating for the ESO CUBES UV spectrograph
High efficiency transmission grating for the ESO CUBES UV spectrograph
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适用于 ESO CUBES 紫外光谱仪的高效透射光栅
DOI：
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
A. Zanutta
中科院分区：
文献类型：
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作者：
U. Zeitner;H. Dekker;F. Burmeister;T. Flügel;A. Bianco;A. Zanutta
CUBES是卡塞格伦U波段高效光谱仪，是一种在300 nm至400 nm的紫外光谱范围内工作的高效仪器，分辨率不低于20，000。立方体将安装在欧洲南方天文台甚大望远镜的卡塞格伦焦点上。本文简要回顾了各种类型的设备作为分散元件在天文摄谱仪，以实现高分辨率，确定二进制透射光栅作为最佳候选技术的CUBES仪器的微光刻之前。我们描述了一般的光刻制造技术，两种不同的设计考虑，以实现所需的高分辨率透射光栅，其原型的直接写入光刻制造技术，并实现光学性能的表征。展望实现光栅的最终仪器，考虑到光刻写入能力的最新发展。
CUBES is the Cassegrain U-Band Efficient Spectrograph, a high-efficiency instrument operating in the UV spectral range between 300 nm and 400 nm with a resolution not less than 20,000. CUBES is to be installed at a Cassegrain focus of the Very Large Telescope of the European Southern Observatory. The paper briefly reviews various types of devices used as dispersing elements in astronomical spectrographs to achieve high resolution, before identifying binary transmission gratings produced by microlithography as the best candidate technology for the CUBES instrument. We describe the lithographic fabrication technology in general, two different design considerations to achieve the required high-resolution transmission grating, its prototyping by a direct-write lithographic fabrication technology, and the characterization of the achieved optical performance. An outlook to the realization of the grating for the final instrument, taking the most recent developments of lithographic writing capabilities into consideration is given.