Applications of Atmospheric-Pressure Glow Plasma: Practical Uses of the Atmospheric-Pressure Plasma Processing Unit "Aiplasma"
Applications of Atmospheric-Pressure Glow Plasma: Practical Uses of the Atmospheric-Pressure Plasma Processing Unit "Aiplasma"
复制标题
大气压辉光等离子体的应用：大气压等离子体处理装置“Aiplasma”的实际应用
DOI：
10.1585/jspf.79.1022
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Y. Sawada
中科院分区：
文献类型：
--
作者：
Y. Sawada
我们已经开发并销售了一种名为Aiplasma的独特等离子体处理装置。在常压下工作，允许配置适合批量生产的连续加工生产线。在该装置中，高密度等离子体在容器内产生，活性等离子体向容器外发射，进行下游等离子体处理。它具有各种改性材料表面的潜力，例如增加润湿性，去除有机污染物以增强粘合性，以及提高有机材料的粘附强度。Aiplasma已应用于许多实际过程中，如LCD模块、电子元件和印刷电路板的生产。本文介绍了该工艺技术及其实际应用。
We have developed and marketed a unique plasma processing unit named Aiplasma. which operates under atmospheric pressure, allowing the configuration of continuous processing lines suitable for mass production. In this unit, high density plasma is generated inside a vessel and active plasma species are emitted outside the vessel to make downstream plasma treatment. It has various potentials for modifying material surface such as increasing wettability, removing of organic contaminants to enhance bondability, and improving the adhesion strength of organic materials. Aiplasma has been used in many actual processes such as the production of LCD modules, electric components, and printed circuit boards. This report describes the process technology and its practical applications.