Fast surface profiler by white-light interferometry using a new algorithm, the SEST algorithm
Fast surface profiler by white-light interferometry using a new algorithm, the SEST algorithm
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使用新算法（SEST 算法）通过白光干涉测量进行快速表面轮廓仪
DOI：
10.1117/12.453634
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
K. Kitagawa
中科院分区：
文献类型：
--
作者：
A. Hirabayashi;H. Ogawa;K. Kitagawa
我们设计了一种基于白光干涉测量的表面轮廓快速算法。它是根据抽样理论中的平方包络函数估计而命名的SEST算法。传统的白光干涉表面轮廓测量方法建立在数字信号处理技术的基础上，数字信号处理技术被用作连续信号处理的近似值。因此，这些方法需要较窄的采样间隔才能获得良好的逼近精度。在本文中，我们介绍了一种利用采样理论的全新方法。也就是说，我们提供了一个广义采样定理，它从干涉条纹的采样值重建白光干涉条纹的平方包络函数。当使用中心波长为600 nm、带宽为60 nm的滤光片时，SEST算法的采样间隔比传统方法的采样间隔宽6-14倍。SEST算法已经安装在一个商业系统中，该系统实现了世界上最快的扫描速度42.75微米/S。对于大于100微米的测量范围，该系统的高度分辨率为10 nm量级。
We devise a fast algorithm for surface profiling by white- light interferometry. It is named the SEST algorithm after Square Envelope function estimation by Sampling Theory. Conventional methods for surface profiling by white-light interferometry based their foundation on digital signal processing technique, which is used as an approximation of continuous signal processing. Hence, these methods require narrow sampling intervals to achieve good approximation accuracy. In this paper, we introduce a totally novel approach using sampling theory. That is, we provide a generalized sampling theorem that reconstructs a square envelope function of a white-light interference fringe from sampled values of the interference fringe. A sampling interval in the SEST algorithm is 6-14 times wider than those of conventional methods when an optical filter of the center wavelength 600 nm and the bandwidth 60 nm is used. The SEST algorithm has been installed in a commercial system which achieved the world's fastest scanning speed of 42.75 micrometers /s. The height resolution of the system lies in the order of 10 nm for a measurement range of greater than 100 micrometers .