Suitability of binary oxides for molecular-beam epitaxy source materials: A comprehensive thermodynamic analysis
Suitability of binary oxides for molecular-beam epitaxy source materials: A comprehensive thermodynamic analysis
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DOI：
10.1063/5.0013159
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发表时间：
2020-08-01
期刊：
影响因子：
6.1
通讯作者：
Liu, Zi-Kui
中科院分区：
文献类型：
--
作者：
Adkison, Kate M.;Shang, Shun-Li;Liu, Zi-Kui
我们对128种二元氧化物的挥发性进行了全面的热力学分析，以评估它们作为氧化物分子束外延（MBE）源材料的适用性。16种固态或液态氧化物从稳定的氧化物源挥发到气态几乎一致：As2O3、B2O3、BaO、MoO3、OsO4、P2O5、PbO、PuO2、Rb2O、Re2O7、Sb2O3、SeO2、SnO、ThO2、Tl2O和WO3。另外24种氧化物可提供分子束，主要气体种类为CeO、Cs2O、DyO、ErO、Ga2O、GdO、GeO、HfO、HoO、In2O、LaO、LuO、NdO、PmO、PrO、PuO、ScO、SiO、SmO、TbO、Te2O2、U2O6、VO2和YO2。本研究结果与文献中已有的实验结果非常吻合。例如，As2O3, B2O3, BaO, MoO3, PbO， Sb2O3和WO(3)是唯一用于MBE的理想类别的氧化物。剩余的氧化物被认为是理想的MBE，等待实验验证。我们还考虑两相混合物作为实现理想MBE源所期望的一致蒸发特性的途径。其中包括（Ga2O3+ Ga）生成Ga2O分子束(g), （GeO2+ Ge）生成GeO(g), （SiO2+ Si）生成SiO(g), （SnO2+ Sn）生成SnO(g)等；这些子氧化物源使子氧化物MBE成为可能。我们的分析提供了128种二元氧化物的冷凝相上气体的蒸汽压，根据熔化温度，这些氧化物可能是固体或液体。
We have conducted a comprehensive thermodynamic analysis of the volatility of 128 binary oxides to evaluate their suitability as source materials for oxide molecular-beam epitaxy (MBE). 16 solid or liquid oxides are identified that evaporate nearly congruently from stable oxide sources to gas species: As2O3, B2O3, BaO, MoO3, OsO4, P2O5, PbO, PuO2, Rb2O, Re2O7, Sb2O3, SeO2, SnO, ThO2, Tl2O, and WO3. An additional 24 oxides could provide molecular beams with dominant gas species of CeO, Cs2O, DyO, ErO, Ga2O, GdO, GeO, HfO, HoO, In2O, LaO, LuO, NdO, PmO, PrO, PuO, ScO, SiO, SmO, TbO, Te2O2, U2O6, VO2, and YO2. The present findings are in close accord with available experimental results in the literature. For example, As2O3, B2O3, BaO, MoO3, PbO, Sb2O3, and WO(3)are the only oxides in the ideal category that have been used in MBE. The remaining oxides deemed ideal for MBE awaiting experimental verification. We also consider two-phase mixtures as a route to achieve the desired congruent evaporation characteristic of an ideal MBE source. These include (Ga2O3+ Ga) to produce a molecular beam of Ga2O(g), (GeO2+ Ge) to produce GeO(g), (SiO2+ Si) to produce SiO(g), (SnO2+ Sn) to produce SnO(g), etc.; these suboxide sources enable suboxide MBE. Our analysis provides the vapor pressures of the gas species over the condensed phases of 128 binary oxides, which may be either solid or liquid depending on the melting temperature.