Characterization of Thin Metal Films Using Terahertz Spectroscopy
Characterization of Thin Metal Films Using Terahertz Spectroscopy
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使用太赫兹光谱表征金属薄膜
DOI：
10.1109/tthz.2017.2786692
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发表时间：
2018
影响因子：
3.2
通讯作者：
Weili Zhang
中科院分区：
文献类型：
--
作者：
Zhiyong Wang;Yunhui Han;Ningning Xu;Lin Chen;Chuanwei Li;Liang Wu;Weili Zhang
提出了一种模拟金属薄膜传输的理论模型。利用太赫兹光谱学，通过将实验数据拟合到理论模型中，同时确定了两个关键特性参数：电导率和厚度。研究了三种不同的金属薄膜，铝、铜和银。测量的电导率明显小于体积值。所得样品厚度与石英厚度监测仪测得的厚度一致。
A theoretical model is presented to simulate the transmission of thin metal films. Using terahertz spectroscopy, the two key characteristic parameters, conductivity and thickness, are determined simultaneously by fitting the experimental data to the theoretical model. Three different metal films, aluminum, copper, and silver, are investigated. The measured conductivities are significantly less than the bulk values. The sample thicknesses obtained are consistent with those estimated by the quartz thickness monitor.