Molecular dynamics simulations for gas cluster ion beam processes
Molecular dynamics simulations for gas cluster ion beam processes
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DOI：
10.1016/j.vacuum.2009.11.018
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发表时间：
2010-03-24
期刊：
影响因子：
4
通讯作者：
Matsuo, Jiro
中科院分区：
文献类型：
--
作者：
Aoki, Takaaki;Seki, Toshio;Matsuo, Jiro
采用分子动力学方法模拟了大尺寸氩团簇撞击硅靶的过程。从入射能量、团簇尺寸和入射角的角度研究了大团簇碰撞的典型碰撞效应--弹坑形成的特征。分子动力学模拟结果表明，入射团簇穿透固体靶并形成凹坑的条件主要取决于单个原子的入射能量，而不是团簇的总入射能量。此外，为了研究大团簇离子束表面改性效果，还对不规则表面结构进行了连续多团簇撞击和掠射角团簇辐照的分子动力学模拟。（C）2009 Elsevier Ltd.保留所有权利。
Molecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target and causes a crater is mainly dominated by the incident energy-per-atom rather than total incident energy of the cluster. Additionally, the MD simulations of sequential multiple cluster impacts and grazing-angle cluster irradiation on irregular surface structures were studied to characterize the surface modification effects with large cluster ion beam process. (C)2009 Elsevier Ltd. All rights reserved.