Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated Using a Carousel-Type Sputtering System
Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated Using a Carousel-Type Sputtering System
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DOI：
10.1143/jjap.48.025503
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发表时间：
2009-02-01
影响因子：
1.5
通讯作者：
Shimokohbe, Akira
中科院分区：
文献类型：
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作者：
Sakurai, Junpei;Hata, Seiichi;Shimokohbe, Akira
我们评估了使用转盘式溅射系统制备的Cu-Zr薄膜金属玻璃（TFMG）的特性。在该系统中，通过独立控制每个目标的射频功率，可以容易地合成样品并控制其合金成分。在本研究中，我们展示了Cu-Zr TFMG的制造，并评估其热性能。不同组成的Cu-Zr样品表现出玻璃化转变;然而，Cu-Zr TFMG的热性能取决于每个元素的溅射速率。至少，在衬底的单次旋转期间，将每种元素的溅射速率设定为小于各自的原子直径，以获得具有稳定玻璃化转变的Cu-Zr TFMG。(C)2009日本应用物理学会
We evaluated the characteristics of Cu-Zr thin film metallic glasses (TFMGs) fabricated using a carousel-type sputtering system. In this system, it is easy to synthesize samples and control their alloy composition by controlling the radio-frequency power for each target independently. In the present study, we demonstrated the fabrication of Cu-Zr TFMGs and evaluated their thermal properties. Cu-Zr samples of various compositions showed a glass transition; however, the thermal properties of the Cu-Zr TFMGs depended on the sputter rate of each element. At the least, the sputter rate of each element during a single rotation of the substrate was set to less than the respective atomic diameter in order to obtain Cu-Zr TFMGs with a stable glass transition. (C) 2009 The Japan Society of Applied Physics