Organic plasma process for simple and substrate-independent surface modification of polymeric BioMEMS devices
Organic plasma process for simple and substrate-independent surface modification of polymeric BioMEMS devices
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DOI:
10.1016/j.bios.2004.01.003
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发表时间:
2004-07-15
影响因子:
12.6
通讯作者:
Karube, I
中科院分区:
文献类型:
--
作者:
Hiratsuka, A;Muguruma, H;Karube, I
A polymeric bio micro electromechanical systems (BioMEMS) device was fabricated using organic plasma polymerization, by which the surface of a polymeric substrate could easily be modified through vapor-phase deposition of organic thin films. This technique, capable of polymeric deposition of any kind of monomer, can serve the purpose of anti-fouling coating, wettability control, or layer-to-layer interface creation, on the surface of any given chemically-inert polymeric substrate without involving cumbersome surface organic reactions. A prototype device was fabricated to have an array of electrochemical glucose biosensors with the three electrode configuration, each of which has a microfluidic channel (500 mum x 800 mum) for capillary-action-driven sample delivery and the concerned enzymatic reaction. Stressing the advantages of the plasma polymerization process using a polymeric substrate together with some additional features accomplished in our device fabrication, new possibilities in the field of polymeric BioMEMS are discussed. (C) 2004 Elsevier B.V. All rights reserved.