S.Wickramanayaka et al: "Film stress and hardness of a-SiC: H films with composition" The Bulletin of the Research Institute of Electronics, Shizuoka University. 30(2). 119-122 (1996)
S.Wickramanayaka et al: "Film stress and hardness of a-SiC: H films with composition" The Bulletin of the Research Institute of Electronics, Shizuoka University. 30(2). 119-122 (1996)
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S.Wickramanayaka 等人:“a-SiC 的薄膜应力和硬度:具有成分的 H 薄膜”静冈大学电子研究所通报。
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