Pitfalls in amorphous carbon studies
Pitfalls in amorphous carbon studies
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DOI：
10.1016/s0925-9635(03)00014-1
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发表时间：
2003-02-01
影响因子：
4.1
通讯作者：
Lifshitz, Y
中科院分区：
文献类型：
--
作者：
Lifshitz, Y
与无定形碳（a-C）科学和技术相关的大量文献表明了错误的数据。这些原因是：(1) 用于制备 a-C 的沉积系统的复杂性，(2) 沉积的 a-C 薄膜的复杂性、不均匀性。目前的工作强调了与这种复杂性相关的一些问题，并举例说明了它如何可能导致误导性结果和不正确的结论。沉积系统产生的困难通过 a-C 特性的离子能量依赖性得到证明。通过不同技术表征此类薄膜的示例，指出了由于 a-C 薄膜的不均匀结构而引起的复杂性，一些技术是表面敏感的，一些是体敏感的，一些是大面积平均的，一些具有非常高的局部分辨率。 (C) 2003 Elsevier Science B.V. 保留所有权利。
The extensive literature related to amorphous carbon (a-C) science and technology is indicative of erroneous data. These result from: (1) the complex nature of the deposition systems used for a-C preparation, (2) the complex, non-uniform nature of the deposited a-C films. The present work highlights some of the problems associated with this complexity and gives examples of how it may lead to misleading results and incorrect conclusions. The difficulties arising from the deposition systems are demonstrated through the ion energy dependence of the a-C properties. Complications arising from the non-uniform structure of a-C films are pointed out by examples of characterizations of such films by different techniques, some surface sensitive, some bulk sensitive, some averaging large areas, some have a very high local resolution. (C) 2003 Elsevier Science B.V. All rights reserved.