Kelvin Probe Force Microscope Observation of Donors' Arrangement in Si Transistor Channel
Kelvin Probe Force Microscope Observation of Donors' Arrangement in Si Transistor Channel
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硅晶体管沟道中施主排列的开尔文探针力显微镜观察
DOI:
10.4028/www.scientific.net/amr.1117.82
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发表时间:
2015
期刊:
影响因子:
--
通讯作者:
Michiharu Tabe
中科院分区:
文献类型:
--
作者:
Krzysztof Tyszka;Daniel Moraru;Takeshi Mizuno;Ryszard Jablonski;Michiharu Tabe