The Characteristics of Structural Properties of Polycrystalline Al-doped ZnO Films by Direct Current Magnetron Sputtering using Various Al2O3 Contents in Ceramic Targets
The Characteristics of Structural Properties of Polycrystalline Al-doped ZnO Films by Direct Current Magnetron Sputtering using Various Al2O3 Contents in Ceramic Targets
复制标题
不同Al2O3含量陶瓷靶材直流磁控溅射多晶Al掺杂ZnO薄膜的结构性能特征
DOI：
--
复制
发表时间：
2015
期刊：
影响因子：
--
通讯作者：
Tetsuya Yamamoto
中科院分区：
文献类型：
--
作者：
Junichi Nomoto;Katsuhiko Inaba;Shintaro Kobayashi;Minoru Osada; Hisao Makino;Tetsuya Yamamoto
