A small-gap electrostatic micro-actuator for large deflections.
A small-gap electrostatic micro-actuator for large deflections.
复制标题
DOI：
10.1038/ncomms10078
复制
发表时间：
2015-12-11
影响因子：
16.6
通讯作者：
Lenz M
中科院分区：
文献类型：
--
作者：
Conrad H;Schenk H;Kaiser B;Langa S;Gaudet M;Schimmanz K;Stolz M;Lenz M
常见的准静态静电微致动器由于电极分离和不稳定的驱动区域而具有显著的偏转限制。最先进的静电致动器实现了约三分之一的电极间距的最大偏转。通常需要大的电极间隔和高驱动电压来实现大的致动器运动。在这里，我们报告了一种静电致动器类，采用CMOS兼容工艺制造，可以在小电极间距的情况下实现高偏转。提出的概念使得纳米级小电极间距内的巨大静电力可用于大偏转。测量大于电极间隔的静电致动。分析理论与测量和仿真结果进行比较，使这些执行器更深入的了解。缩放行为的讨论表明显着的未来改进致动器偏转。提出的驱动概念，使调查和开发新的微系统具有很高的潜力，提高设备和系统的性能。 大多数静电致动器遭受操作不稳定性，即所谓的吸合效应。在这里，作者报告了一种静电致动器概念，该概念使得纳米级小电极间隔内的巨大静电力可以实现大偏转。
Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of approximately one third of the electrode separation. Large electrode separation and high driving voltages are normally required to achieve large actuator movements. Here we report on an electrostatic actuator class, fabricated in a CMOS-compatible process, which allows high deflections with small electrode separation. The concept presented makes the huge electrostatic forces within nanometre small electrode separation accessible for large deflections. Electrostatic actuations that are larger than the electrode separation were measured. An analytical theory is compared with measurement and simulation results and enables closer understanding of these actuators. The scaling behaviour discussed indicates significant future improvement on actuator deflection. The presented driving concept enables the investigation and development of novel micro systems with a high potential for improved device and system performance. Most electrostatic actuators suffer from an operational instability, the so-called pull-in effect. Here, the authors report an electrostatic actuator concept which makes the huge electrostatic forces within nanometre small electrode separation accessible for large deflections.