Cu precipitation in CZ-Si crystals heavily doped with p-type dopant
Cu precipitation in CZ-Si crystals heavily doped with p-type dopant
复制标题
p型掺杂重掺杂CZ-Si晶体中Cu的沉淀
DOI:
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发表时间:
2013
期刊:
影响因子:
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通讯作者:
R. Taniguchi and S. R. Nishitani
中科院分区:
文献类型:
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作者:
Y. Ohno;K. Inoue;K. Kutsukake;Y. Tokumoto;I. Yonenaga;H. Yoshida;S. Takeda;R. Taniguchi and S. R. Nishitani