Effect of electrodes on the phase evolution and microstructure of Pb(Zr0.53Ti0.47)O3 films
Effect of electrodes on the phase evolution and microstructure of Pb(Zr0.53Ti0.47)O3 films
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电极对Pb(Zr0.53Ti0.47)O3薄膜相演化和微观结构的影响
DOI：
10.1080/00150199408017601
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发表时间：
1994
期刊：
影响因子：
0.8
通讯作者：
A. I. Kzngon
中科院分区：
文献类型：
--
作者：
H. Alshareef;K. R. Becllur;O. Auciello;A. I. Kzngon
摘要研究并比较了溶胶-凝胶法在RuO 2/SiO2/Si和Pt/Ti/SiO2/Si上沉积PZT薄膜的晶化行为。X射线衍射研究表明，在这两种情况下，钙钛矿结构的结晶之前烧绿石的形成。在约500°C下，在Pt和RuO 2电极上，所沉积的非晶膜转变为烧绿石相。在沉积在RuO 2电极上的薄膜的情况下，烧绿石相持续到更高的温度，高达700°C，如TEM所示。在沉积在Pt上的膜的情况下，烧绿石相在700°C下退火10分钟后完全转化为钙钛矿。薄膜的形貌和微结构与电极有很强的依赖性。在Pt上生长的膜的特征在于高密度的钙钛矿核。这些晶核的后续生长导致致密的、相纯的钙钛矿膜。与此相反，在RuO 2上生长的薄膜的特点是较低的核密度，导致inho…
Abstract The crystallization behavior of PZT thin films deposited by the sol-gel process on RuO2/SiO2/Si and Pt/Ti/SiO2/Si was studied and compared. X-ray diffraction studies reveal that in both cases crystallization of the perovskite structure is preceded by pyrochlore formation. Transformation of the as-deposited amorphous film to the pyrochlore phase occurs at about 500°C on both Pt and RuO2 electrodes. In the case of films deposited on RuO2 electrodes, the pyrochlore phase persists to higher temperatures, up to 700°C, as TEM shows. In the case of films deposited on Pt, the pyrochlore phase is completely transformed to perovskite upon annealing at 700°C for 10 minutes. The morphology and microstructure of the films are strongly electrode dependent. Films grown on Pt are characterized by a high density of perovskite nuclei. The subsequent growth of these nuclei results in dense, phase-pure perovskite films. In contrast, films grown on RuO2 are characterized by a lower density of nuclei resulting in inho...