Design and Fabrication of a Nonlinear Micro Impact Oscillator
Design and Fabrication of a Nonlinear Micro Impact Oscillator
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DOI：
10.1016/j.proche.2009.07.213
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发表时间：
2009-09
期刊：
影响因子：
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通讯作者：
Xueyong Wei;C. Anthony;David Lowe;M. Ward
中科院分区：
文献类型：
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作者：
Xueyong Wei;C. Anthony;David Lowe;M. Ward
本文介绍了一种以MEMS谐振器为频率控制元件的机械自主冲击振荡器的设计与制造。该设计在开发时考虑了大型二维耦合振荡器阵列的可扩展性。对冲击振荡器的动态特性进行了数值研究，发现几何非线性对静态拉入电压和平衡位置有影响。外部驱动电源可以改变冲击振荡器的频率。振荡器的自主特性简化了驱动电路的复杂性，对于大型二维阵列是必不可少的。
In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.